快速搜索

GEC CCP 反应器

Application ID: 8646


NIST GEC CCP 反应器为研究容性耦合等离子体提供了一个平台,本案例模型研究 13.56MHz 的正弦静电场中功率沉积到等离子体中的机理,它还包含一个连接等离子体和电源的外部电路。

This model is included as an example in the following products:

等离子体模块

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the 技术规格表 and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.