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TM Mode Microwave Plasma

Application ID: 16683


This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.

A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

本案例使用的模块如下:

RF 模块