Design and Optimization of Highly Sensitive Single Axis Accelerometer using COMSOL Multiphysics®

Kunal A.Kshirsagar[1], K.Govardhan[1],
[1]VIT University, Sensor System Technology, School of Electronics Engineering, Vellore, Tamil Nadu, India
[2]VIT University, MEMS & Sensor Division, School of Electronics Engineering, Vellore, Tamil Nadu, India

Accelerometers are successfully commercialized MEMS devices. COMSOL Multiphysics® has been used in the modeling, simulation and optimizing of this design. The piezoresistive accelerometer is made up of a square proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure and the springs. There is an elongation or shortening of the suspension beam and springs when the support frame moves relative to the proof mass. Models were simulated and studied for their performance characteristics in terms of von Mises stress, displacement, Eigen frequency, and conductivity change in the piezoresistors. The ends of the flexures experience the maximum stress and the piezoresistors are placed in optimal positions so as to cause maximum change in the output.