The Basics of the Plasma Module
Watch this previously held webinar for a general introduction to the Plasma Module, an add-on product to COMSOL Multiphysics® that expands the functionality and tools for modeling plasma systems. We begin with introducing the different physics interfaces available for modeling plasma and discuss in detail the interfaces for modeling nonequilibrium discharges. This includes the application-specific interfaces listed below:
- Plasma interface
- Plasma, Time Periodic interface
- Inductively Coupled Plasma interface
- Microwave Plasma interface
From there, we discuss the validity and capabilities of the Plasma Module, plasma model theory, and the significance of plasma chemistry. We conclude the webinar with a demonstration of how to build a model of an inductively coupled plasma (ICP) reactor and provide an overview of a capacitively coupled plasma (CCP) reactor model wherein the ion energy distribution function (IEDF) is computed.
This webinar is relevant to recently released versions of COMSOL Multiphysics®, although you may notice small differences between versions. To learn more about the Plasma Module, click here.