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Comb Drive Simulation using Electromechanics Module
Posted 2017年2月8日 GMT-5 11:11 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Modeling Tools & Definitions Version 5.1 0 Replies
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I am trying to simulate a serpentine spring structure with two symmetric comb drives on both the ends. Although, my structure is perfectly symmetric and both the comb drives have the exact same number of fingers with same dimensions and longitudinal gap, my model shows rotation of the actuator structure which should not be the case and the motion should be unilateral in-plane. The comb drive also shows some unwanted out-of-plane displacement even though no force acts in the z-direction which could cause the motion. I have tried refining the meshing through selective meshing for different parts of the structure but it doesn't seem to resolve the issue.
If I simulate half structure using the 'symmetry' function to define the axis of symmetry the displacement achieved is unilateral. However, it is still accompanied by out-of-plane displacement.
What could be the reason for these discrepancies and how could they be resolved? Thank you for your help.
Suraj
Hello Suraj Sharma
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