论文和技术资料

A micromirror or a torsional actuator in general has been proven to be one of the most popular actuators fabricated by Micro-Electro-Mechanical System (MEMS) technology in many industrial and biomedical applications such as RF switches, a laser scanning display, an optical switch matrix, and biomedical image systems.

In this paper, two stacked micromirrors are presented and analyzed to show better performance than that of the conventional micromirror in terms of angular deflection and actuation voltage. The pull-in voltage of two stacked micromirrors is also derived analytically and compared with that of the conventional micromirror. COMSOL simulation is used to verify the stacked  micromirrors’ analytical result.