Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications

F. Kerrour[1], A. Beddiaf[1], M. Benabbas-Marir[1]
[1]MODerNa Laboratory, University Mentouri, Constantine, Algeria
发布日期 2012

Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial differential equations and provides the advantage of allowing the simulation of the entire device. As application, this sensor has been used to measure the value of plantar pressure in particular points. This pressure allows us to have information on the status of a diabetic’s foot. This simple system is a very effective prevention tool.