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Time multiplexed Gas Flow at low Pressure
Posted 2009年11月9日 GMT-5 11:11 0 Replies
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I am a beginner at using COMSOL and i also have electrical engineering background. I am trying to model the gas flow inside the plasma etch reactor having the gas inflow through an annulus (which distributes the gas in the reactor) until the exit (pumping port) of the reactor. I am operating in the pressure range of 10-50mTorr.
I want to model the time multiplexed ("e.g;switching the gas at the input after every two seconds at a known flowrate") gas flow (transport) inside a reactor and see how one gas replaces the other inside the reactor.
Is there a way to solve this problem with COMSOL ...
-A 2D-Axisymmetric-Model is enough.
-Heat transfer can be neglected.
-I'm happy with a approximative result.
Thanking you in anticipation....
Best regards,
Iqbal
Hello Iqbal Saraf
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