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Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

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How to simulate Squeeze Film Damping

Posted 2011年4月16日 GMT-4 14:52 Version 4.0a 2 Replies

Alec Yovanovitch
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Hello,

I would like to use COMSOL to simulate the effects of squeeze film damping on an oscillating microcantilever in a closed body of fluid. Since the body is closed, the fluid displaced by the microcantilever as it moves down pushes on the top of the cantilever. Any ideas as to how I should go about this? What models to learn from, and what modules / settings I should use?

Thanks,
Alec
2 Replies Last Post 2016年11月21日 GMT-5 07:23
Ivar KJELBERG COMSOL Multiphysics(r) fan, retired, former "Senior Expert" at CSEM SA (CH)
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Posted: 1 decade ago 2011年4月16日 GMT-4 15:26
Hi

you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use

--
Good luck
Ivar
Hi you have an example model in the MEMS case of the Model library. It treats the squeezed film damping of a mems accelerometer plate. Take a look, its in 3.5 and at least in 4.1 so probably in 4.0 too. Anyhow I can only suggest that you find out how to upgrade to latest version, its far easier to use -- Good luck Ivar
Anand Upadhyay
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Posted: 8 years ago 2016年11月21日 GMT-5 07:23

Hello Ivar,

As suggested we don't get model in model library for accelerator in version 5.0
Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer.

regards,
anand
Hello Ivar, As suggested we don't get model in model library for accelerator in version 5.0 Please tell some steps for squeeze film air damping in MEMS PZR Accelerometer. regards, anand

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