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capacitive pressure sensor model

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Hi

I have a question about 2D capacitive pressure sensor model. I can not understand the role of Trapezoidal part in its structure. Is this considered to be a vacuum? for reference pressure? Also I can not understand where exactly the pressure will be applied? I mean should we consider that small air gap is the place where different pressures should be applied to? or the pressure will be applied on top of that air gap (in trapezoidal region) [although based on deformation it doesn't seems correct). I would be really grateful if someone can give me a bit of explanations.

Best
Bahar

0 Replies Last Post 2012年3月6日 GMT-5 11:32
COMSOL Moderator

Hello Bahar

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