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Consider acoustic wave resonator material across which the applied electric field = zero as piezoelectric or linearly elastic

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I am trying to make acoustic wave resonator device with layers stack as follows (from top to bottom) Au/AlN/AlGaN/Mo/GaN/AlN/SiC.

AlN between Au and AlGaN is piezoelectric layer with terminal voltage and ground across it. However, shall I consider AlN layer between SiC and GaN as piezoelectric layer or linearly elastic layer? I am not applying any terminal voltage directly to this layer.

The results I am getting in both the cases are drastically different.


0 Replies Last Post 2023年9月15日 GMT-4 14:10
COMSOL Moderator

Hello Anshul Jain

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