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Piezoelectric Devices
Posted 2013年9月17日 GMT-4 12:31 1 Reply
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Hi,
I am working on a project where I need to fabricate a layered 3D cantilever beam in COMSOL, the base being of polysilicon and on top a layer of piezoelectric material. The problem is, polysilicon is not getting accepted as a material since its "elasticity matrix", "coupling matrix" and "relative permittivity" values are missing. Can anyone tell me these values or suggest me an alternative? The problem is urgent and quick reply will be much appreciated. Thanks in advance---Debarati.
I am working on a project where I need to fabricate a layered 3D cantilever beam in COMSOL, the base being of polysilicon and on top a layer of piezoelectric material. The problem is, polysilicon is not getting accepted as a material since its "elasticity matrix", "coupling matrix" and "relative permittivity" values are missing. Can anyone tell me these values or suggest me an alternative? The problem is urgent and quick reply will be much appreciated. Thanks in advance---Debarati.
1 Reply Last Post 2013年9月17日 GMT-4 14:24
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Posted:
1 decade ago
Seems you have that polysilicon domain selected under piezoelectric material. Make sure that domain is a selected under linear elastic material.
Hope this helps!
Hope this helps!