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Modelling of Squeeze film damping in Perforated MEMS structures of a resonant pressure sensor
Posted 2014年9月30日 GMT-4 12:53 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Geometry, Mesh Version 4.3 0 Replies
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I'm a novice to COMSOL and am eager to know how would I be able to model squeeze film damping to obtain the damping coefficient and quality factor in a perforated MEMS structure. Sadly, as I have noticed , I have version 4.3 which includes modified Reynold's equation but there's no direct method to implement perforations in the structure. Besides, how could we compute an infinite series equation in COMSOL. In a nutshell, it would be extremely helpful if someone could provide me a tutorial with reference to the same. I have referred to the example of a squeezed film accelerometer in the model library, however, the model does not match the one I have implemented in my design.
Any help would be highly appreciated.
Thanks & Regards,
Hello Saoni Banerji
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