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Pull In of an RF MEMS switch

Posted 2014年12月25日 GMT-5 05:28 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics 0 Replies

Fandi Hamid
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I'm am learning on shunt capacitive RF MEMS switch using COMSOL software. I tried to develop this switch using the tutorial "Pull In of an RF MEMS switch".my prob is I couldn't understand on how they estimate the value of the parameter for spring stiffness and contact force from the formula contact force...need explanation.Tq
0 Replies Last Post 2014年12月25日 GMT-5 05:28
COMSOL Moderator

Hello Fandi Hamid

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