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failed to create mesh for a thin MEMS device

Posted 2015年3月22日 GMT-4 15:34 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Mesh Version 5.0 0 Replies

Harry Ge
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My device is thin and contain two "inner block" in the arms, so the meshing become difficult. Are there any efficient solution to create mesh?

I may use extremely fine but the speed become extremely slow...

0 Replies Last Post 2015年3月22日 GMT-4 15:34
COMSOL Moderator

Hello Harry Ge

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