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quality factor calculation in Squeezed-Film Gas Damping in an Accelerometer

Posted 2015年5月13日 GMT-4 21:28 Version 4.3, Version 4.4 2 Replies

Chih-Yuan Chen
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Hi all,

I want to get the quality factor in the squeezed-Film accelerometer.

I have simulated a case in COMSOL example 【Squeezed-Film Gas Damping in an Accelerometer】.
In this case, the film-pressure have 1000Pa, 300Pa, and 50Pa. I can get the three different results in time domain, but i cannot get the different quality factor.


If somebody has ever solved my problem. It would be nice to share it in here. Thanks.
2 Replies Last Post 2016年6月9日 GMT-4 04:05
Saoni Banerji
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Posted: 10 years ago 2015年5月25日 GMT-4 12:18
I'm having the same issue in calculating quality factor of a squeezed-film gas damping in an accelerometer. I believe first we need to place a bottom electrode below the cantilever and apply the actuation force. However, the problem is that if I leave the space between the cantilever fixed to an end and bottom electrode empty, the structure will not be meshed. Could anyone please help me resolve this issue?

Also, excuse me for my ignorance as I have just started using the software.


Best Regards,
Saoni
I'm having the same issue in calculating quality factor of a squeezed-film gas damping in an accelerometer. I believe first we need to place a bottom electrode below the cantilever and apply the actuation force. However, the problem is that if I leave the space between the cantilever fixed to an end and bottom electrode empty, the structure will not be meshed. Could anyone please help me resolve this issue? Also, excuse me for my ignorance as I have just started using the software. Best Regards, Saoni
Vasudha Agrawal
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Posted: 8 years ago 2016年6月9日 GMT-4 04:05
Hi,

can you please tell me how did you add squeezed film damping in your model?


Regards,
Vasudha Agrawal
Hi, can you please tell me how did you add squeezed film damping in your model? Regards, Vasudha Agrawal

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