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Dynamic Saturation of TiZrV Layer of Non-Evaporable Getters (NEG) Chamber
发布日期 2016
Non-evaporable getters (NEG) chambers are 316L vacuum chambers coated with a TiZrV layer, widely used in accelerator systems. This particular alloy works, when thermally activated, as a linear pump for almost all gas species inside the chamber: molecules are adsorbed on the surface or soaked up in the bulk. Acceptance tests of these chambers are provided with different manual gas injection tests in labs. The purpose of this study is to predict and avoid the effect of the saturation of the NEG elementary pumping sites by using simulation.
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