FEM Analysis of MEMS Capacitive Presure Sensor with Segmented Boss Structure for DiaphragmA. K. Ramesh , P. Ramesh ,
College of Engineering Munnar, Munnar, Kerala, India
Microelectromechanical system (MEMS) based capacitive pressure sensor designs with improved sensitivity is always a matter of great concern and the recent developments in such a design is the MEMS capacitive pressure sensor with bossed diaphragm.The bossed diaphragm model improves sensitivity but it compromises the range of operation which lead to a new design with the segmented boss structure. This paper describes the FEM analysis and suggests the simple fabrication techniques for developing a MEMS capacitive pressure sensor with segmented boss structure for the diaphragm.The FEA was carried out using MEMS Module of COMSOL Multyphysics® software.