论文和技术资料

We, Sumitomo Heavy Industries, Ltd. have been developing a microwave ion source since 2011. The design of the chamber is important to generate plasma efficiently. The plasma chamber was designed with the COMSOL Multiphysics RF module, and reported the results at this conference last year. In order to improve the reflective characteristic further, we redesigned the plasma chamber with the RF module. As a result, the microwave reflectivity was reduced to less than half.