MEMS Acoustic Pixel

A. Arevalo[1], I. G. Foulds[2]
[1]King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2]The University of British Columbia, Vancouver, BC, Canada
发布日期 2014

A COMSOL Multiphysics® simulation was used to simulate the behavior of a micro-membrane (Acoustic Pixel) to be used as a potential acoustic transducer. The MEMS and Piezoelectric devices interfaces were used to simulate such transducer. A four-cantilever spring configuration is initially proposed. Each cantilever has a width of 30 µm and are connected to a central circular plate with a radius of 150 µm.

The development of a Digital Micro-Loudspeaker would directly impact the electronics industry, by creating new components that utilize less power and space on a circuit board, decreasing its fabrication costs without compromising the sound quality, but rather improving it. Moreover, hearing aid devices could substantially benefit of acoustic MEMS advancements and directly improve a person’s quality life.