Modeling a Resonant Near-Field Scanning Microwave Microscope (RNSMM) Probe

N. Smith[1], K. Lees[1], A. Gregory[1], R. Clarke[1]
[1]The National Physical Laboratory, Teddington, Middlesex, UK
发布日期 2014

The current drive to go beyond the state of the art in novel near field scanning microwave microscope (NSMM) metrology at the micro scale, to make them capable of traceable measurements on functional materials, has led to the development of a finite element model of the probe of a resonant near field scanning microwave microscope (RNSMM). The model has been validated against an analytical solution. Different sample configurations were investigated to understand how imperfect geometry and non-uniform materials affect the capacitance and the resistance of the system. The modelling has proved to be a very useful tool to provide insight into the effects of likely imperfections in this measurement technique.