论文和技术资料

In this paper, we focused on modeling of the piezoresistive pressure sensors. The Structural Mechanics Module of COMSOL Multiphysics® software is used to model the sensor and make a comparative study of the MEMS pressure sensor with different shape and size of membrane. The impact of membrane shape and size on sensitivity and nonlinearity of the pressure sensor is investigated. For example, it was shown that for the same size, the square shape membrane has larger sensitivity and nonlinearity than the round one. The accuracy of the model was verified with measurement results of three different families of sensors. This model can be used in finding the optimum design geometrical dimensions of the sensor according to the sensor specifications for different applications.