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Optimization of Microstructures Used in CMOS-MEMS Devices Based on a Topological Design Process

J. Mares-Carreño [1], G. S. Abarca-Jiménez [2], M. A. Reyes-Barranca [2],
[1] Escuela Superior de Ingeniería Mecánica y Eléctrica, Instituto Politécnico Nacional, Ciudad de Mexico, D.F., Mexico
[2] Centro de Investigación y de Estudios Avanzados del Instituto Politécnico Nacional, Ciudad de México, D.F., Mexico
发布日期 2016

The paper exhibits the process followed to obtain the geometry of a support for a MEMS inertial sensor by means of a topology optimization process. The SIMP method is used for the optimization process in which the objective is to obtain a support structure with a minimum rigidity expressed by a maximum allowed displacement in a stablished work direction. In the application of the SIMP method a mechanism for mesh independency is omitted in order to obtain an easily translatable result from topology to CAD model when using square mesh elements whose side length attends dimensional technological restrictions of the CMOS process.

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