论文和技术资料

Finite elements using COMSOL Multiphysics have been used to simulate the edge plasma in a large area capacitively coupled RF reactor. In order to reduce numerical difficulties simplified reactor edge geometries have been used. First results show the importance of electrostatic double layers within this plasma. In addition the non-uniform behaviour of the plasma sheath around convex and concave corners turns out to be a basic feature of the edge plasma. The plasma physics and plasma-wall interaction are strongly influenced by these elementary structures.The simple model and simple geometry result in an important tool giving new insights and understanding into the physics of RF edge plasmas. The simulations help design reactor walls to optimize the RF plasma in industrial reactors.