Quartz Transducer Modeling for Development of BAW Resonators

L.B.M. Silva[1], E.J.P. Santos[1]
[1]Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil
发布日期 2012

Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for harsh environments. For piezoelectric transducers, plate thickness determines the operating frequency of the resonator, which is frequently tuned in the shear thickness vibration mode. Quartz has been the material of choice for the fabrication of bulk acoustic wave (BAW) devices, which are used for measurement of many quantities, such as, temperature, pressure, acceleration, mass. All the required steps to simulate the shear thickness vibration mode for quartz bulk acoustic wave (BAW) devices are presented in both, two and three dimensions. Different crystal cuts are analyzed, including the AT-cut. The simulation was carried out with COMSOL Multiphysics 4.2a.