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Study of Effect on Resonance Frequency of Piezoelectric Unimorph Cantilever for Energy Harvesting

G. R. Prakash[1], K. M. V. Swamy[1], S. Huddar[1], B. G. Sheeparamatti[1], Kirankumar B. B.[1]
[1]Basaveshwar Engineering College, Bagalkot, Karnataka, India

The focus of this paper is to study the effect on resonance frequency and power enhancement techniques[1] of piezoelectric MEMS and modeling, design, ...

Design and Analysis of MEMS Gyroscope

L. Sujatha[1], B. Preethi[1]
[1]Rajalakshmi Engineering College, Chennai, India

MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This ...

CVD Graphene Growth Mechanism on Nickel Thin Films - new

K. Al-Shurman[1], H. Naseem[2]
[1]The Institute for Nanoscience & Engineering, University of Arkansas, Fayetteville, AR, USA
[2]Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA

Chemical vapor deposition is considered a promising method for synthesis of graphene films on different types of substrate utilizing transition metals ...

Design of a MEMS Capacitive Comb-drive Accelerometer

T. Kaya[1], B. Shiari[2], K. Petsch[1], and D. Yates[2]
[1]Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
[2]University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI

In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have ...

Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta[1], T. Pahwa[1], R. Bansal[1], V. Bansal[1], B. Prasad[1], D. Kumar[1]
[1]Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. ...

Tunable MEMS Capacitor for RF Applications

H. S. Shriram[1], T. Nimje[1], D. Vakharia[1]
[1]BITS Pilani, Rajasthan, India

Radio Frequency MEMS devices have emerged to overcome the problem of high losses associated with semiconductors at high frequencies. A tunable MEMS ...

Sensitivity Analysis of Different Models of Piezoresistive Micro Pressure Sensors

S. Meenatchisundaram[1], S. M. Kulkarni[2], S. Bhat
[1]Department of Instrumentation and Control Engineering, Manipal Institute of Technology, Manipal, Karnataka, India.
[2]Department of Mechanical Engineering, National Institute of Technology, Surathkal, Karnataka, India.

Piezoresistive pressure sensors have received much attention over the years because of low cost, simple measurement techniques, etc. There is a ...

Surface Plasmon Resonance

J. Crompton[1], S. Yushanov[1], L.T. Gritter[1], K.C. Koppenhoefer[1]
[1]AltaSim Technologies, Columbus, OH, USA

The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. Full insight into surface plasmon ...

Air Damping of Oscillating MEMS Structures: Modeling and Comparison with Experiment

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

Excessive air damping can be detrimental to the performance of oscillating MEMS components. Complex systems, such as structures in pre-etched cavities ...

Simulation and Optimization of MEMS Piezoelectric Energy Harvester with a Non-traditional Geometry

S. Sunithamani[1], P. Lakshmi[1], E. E. Flora[1]
[1]Department of EEE, College of Engineering, Anna University, Chennai, India

Piezoelectric energy harvester converts mechanical vibrations into electrical energy via piezoelectric effect. The geometry of the piezoelectric ...

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