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Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are ...

Surface Acoustic Wave Based MEMS Resonator

S. Dixit[1], R. C. Jain[1]
[1]Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India

Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from ...

Design and Multiphysics Analysis of MEMS Capacitive Microphone

N. J. Krishnapriya[1], M. R. Baiju[1]
[1]College of Engineering, Trivandrum, Kerala, India

In this paper, design and analysis of a novel MEMS capacitive microphone which uses corrugations and perforations in diaphragm is presented. The ...

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are ...

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi [1], G. Khanna [1],
[1] NIT Hamirpur, Hamirpur, Himachal Pradesh, India

This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear ...

Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor

V. S. Selvakumar[1], L. Sujatha[1]
[1]Rajalakhmi Engineering College, Chennai, Tamil Nadu, India

Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device ...

MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the ...

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak [1], S. Kaur [1], A. Gupta [1], P. Chhabra [1], D. Kumar [1], A. Shetty [2]
[1] Kurukshetra University, Kurukshetra, Haryana, India
[2] Indian Institute of Science, Bengaluru, Karnataka, India

The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations ...

Three-Dimensional Modeling of Electrical Scanning Probe Microscopy Problems

G. Gomila [1], L. Fumagalli [2], R. Fabregas [3],
[1] Institut de Bioenginyeria de Catalunya (IBEC), Departament d’Electrònica, Universitat de Barcelona, Barcelona, Spain
[2] School of Physics and Astronomy, University of Manchester, Manchester, United Kingdom
[3] Institut de Bioenginyeria de Catalunya (IBEC), Universitat de Barcelona, Barcelona, Spain

Electrical scanning probe microscopy (SPM) techniques, such as electrostatic force microscopy, nanoscale impedance microscopy or scanning near field ...