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MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the ...

Finite Element Modeling of the Stress Field in a Cell-Seeded Microchannel

G. Zhu, and Y. Li
Lawrence Technological University, Southfield, MI, USA

Fluids used in biomedical microelectromechanical systems (BioMEMS) devices often exhibit very different flow behavior from those in bulk solutions, ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure ...

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are ...

Sensitivity Optimization of Microfluidic Capacitance Sensors

S. Satti[1], M. Baghini[1]
[1]Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For this purpose it is necessary to develop a ...

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal ...

Design & Simulation of Various Shapes of Cantilever Beam for Piezoelectric Power Generator

P. Graak [1], S. Kaur [1], A. Gupta [1], P. Chhabra [1], D. Kumar [1], A. Shetty [2]
[1] Kurukshetra University, Kurukshetra, Haryana, India
[2] Indian Institute of Science, Bengaluru, Karnataka, India

The ambient vibrations can be of great promise for harvesting energy initially at small scale to use for micro and nano scale devices. Such vibrations ...

Simulation of Piezoelectric Transformers with COMSOL

T. Andersen[1], M. A. E. Andersen[1], O. C. Thomsen[1]
[1]DTU Elektro, Technical University of Denmark, Kgs. Lyngby, Denmark

In this work COMSOL is utilized to obtain the Mason lumped parameter model for a piezoelectric transformer (PT) design. The Mason lumped parameters are ...

Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani[1], P. Kagan[2], F. Huizinga[1]
[1]ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
[2]ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas ...

Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening

A. Ivanov [1], U. Mescheder [1],
[1] Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany

Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. ...