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MEMS Based Silicon Load Cell for Weighing Applications

D. Chauhan[1], B. D. Pant[2]
[1]Kurukshetra University, Kurukshetra, Haryana, India
[2]CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two ...

Design of FIDT for 3D Analysis of MEMS Based Gas Sensor Using SAW Technology

V. S. P. Rajesh [1],
[1] St. Mary's Group of Institutions, Hyderabad, India

3D model of MEMS based SAW gas sensor is designed using Focused Inter Digital Transducers design. Surface displacement & Electrical potential are ...

Design and Analysis of Micro-Heaters for Temperature Optimization using COMSOL Multiphysics for MEMS Based Gas Sensor

V. S. Selvakumar[1], L. Sujatha[1]
[1]Rajalakhmi Engineering College, Chennai, Tamil Nadu, India

Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of ...

Design and Simulation of 3D MEMS Piezoelectric Gyroscope using COMSOL Multiphysics®

T.Madhuranath[1], R.Praharsha[1], Dr.K.Srinivasa Rao[1]
[1]Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India

MEMS is the leading technology which combines both electronic and mechanical devices on a single microchip. Tracing the position of the object is an ...

Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness

Y. Jin [1], S. Kumar [1], R. A. Gerhardt [1],
[1] School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA

1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must ...

Design and Simulation of MEMS Micro Heater for DNA Amplification

D. Sharma [1], A. Siddiqua [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

PCR (Polymerase Chain Reaction) is a recent well researched technique which can be employed to obtain an amplified DNA (Deoxyribonucleic Acid). A ...

Nanoscale Heat Transfer using Phonon Boltzmann Transport Equation

S. Sihn[1,2], and A.K. Roy[2]

[1]Air Force Research Laboratory, Wright-Patterson Air Force Base, Dayton, Ohio, USA
[2]University of Dayton Research Institute, Dayton, Ohio, USA

COMSOL Multiphysics was used to solve a phonon Boltzmann transport equation (BTE) for nanoscale heat transport problems. One dimensional steady-state and transient BTE problems were successfully solved based on finite element and discrete ordinate methods for spatial and angular discretizations, respectively, by utilizing the built-in feature of the COMSOL, Coefficient Form of PDE.

Simulations of MEMS Based Piezoresistive Accelerometer Designs in COMSOL

N. Bhalla[1], S. Li[2], and D. Chung[1]
[1]Chung Yuan Christian University, Taiwan, (R.O.C)
[2]National Tsing Hua University, Taiwan, (R.O.C)

Different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure ...

Simulation of a Tether Structure for Ultra-stretchable Monolithic Silicon Fabric

A. Arevalo [1], J. Prieto [1], M. M. Hussain [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that extends a device capability to function as ...