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Calculation of Surface Acoustic Waves on a Piezoelectric Substrate using Amazon™ Cloud Computing

U. Vogel [1], M. Spindler [1], S. Wege [1], T. Gemming [1]
[1] Leibniz Institute for Solid State and Materials, Dresden, Germany

In this work, we seek to simulate SAWs for a better understanding and to benchmark the currently available cloud computing possibilities of COMSOL ...

MEMS Resonator for RF Applications

V. Harshey
Visvesvaraya National Institute of Technology
Nagpur
Maharashtra, India

Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely ...

FSI Analysis of Microcantilevers Vibrating in Fluid Environment

A. Ricci[1] and E. Giuri[1]

[1]Materials and Microsystems Laboratory (CHI-Lab), Politecnico di Torino, Torino, Italy

Cantilever vibration in fluid environment is probably one of the most common Fluid Structure Interaction problems in the field of Micro/Nano Electro ...

Sensitivity Optimization of Microfluidic Capacitance Sensors

S. Satti[1], M. Baghini[1]
[1]Indian Institute of Technology Bombay, Mumbai, Maharashtra, India

As a part of a lab-on-chip-device, more often it is required to measure dielectric constant of the fluid. For this purpose it is necessary to develop a ...

Dynamic Characterization and Mechanical Simulation of Cantilevers for Electromechanical Vibration Energy Harvesting

N. Alcheick[1], H. Nesser[1], H. Debeda[1], C. Ayela[1], I. Dufour [1]
[1]Univ. Bordeaux, IMS Lab, Pessac, France

Energy harvesting from ambient vibrations has become an interesting topic for powering wireless sensor networks. Resonant microdevices based on MEMS ...

MEMS Pirani Sensor for Pressure Measurements in the Fine- and High-Vacuum Range - new

M. Grau[1], F. Völklein[1], A. Meier[1], C. Kunz[1], P. Woias[2]
[1]RheinMain University of Applied Sciences, Institute for Microtechnologies, Rüsselsheim, Germany
[2]University of Freiburg, Department of Microsystems Engineering, Freiburg, Germany

A high performance MEMS Pirani sensor (VAC_03) was designed and optimized based on analytics. Due to the fact that this MEMS Pirani sensor is a 3D ...

Metal MEMS Membrane Based Electric Field Sensor

E. Tahmasebian[1], C. Shafai[1], T. Chen[1]
[1]University of Manitoba, Winnipeg, MB, Canada

A MEMS based electrostatic field sensor is presented which uses capacitive interrogation of an electrostatic force deflected microstructure. The ...

Optimization of MEMS Based Capacitive Accelerometer for Fully Implantable Hearing Aid Application

A. Dwivedi [1], G. Khanna [1],
[1] NIT Hamirpur, Hamirpur, Himachal Pradesh, India

This work describes the design and optimization of three prototypes of microelectromechanical systems (MEMS) capacitive accelerometer-based middle ear ...

Design and Simulation of Underwater Acoustic MEMS sensor

S. Prabhu [1], Nagbhushan [1],
[1] Nitte Meenakshi Institute of Technology, Bengaluru, Karnataka, India

Silicon based MEMS have wide applications in under water sensors. This work aims one such applications, hydrophone. Hydrophone detects the pressure ...

MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the ...