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Design and Finite Element Analysis of Electrothermal Compliant Microactuators

A. R. Kalaiarasi, and S. H. Thilagar
Annauniversity Chennai
TamilNadu, India

Electrothermal actuators are capable of providing larger displacements compared to electrostatic actuators. Four designs for ETC actuators with the same material properties and same dimensions are studied.

Characterization of a Tonpilz Transducer and Performance Analysis for a MEMS-Transducer Array

V. Vadde, and B. Lakshmi G
PESIT

In this paper, we develop and analyze a standard piezoacoustic Tonpilz-transducer model for underwater acoustics in Comsol by addressing the attendant ...

Polyimide Thermal Micro Actuator - new

A. Arevalo[1], I. G. Foulds[2]
[1]Computer, Electrical and Mathematical Sciences and Engineering Division (CEMSE), King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2]School of Engineering, Okanagan Campus, The University of British Columbia, Vancouver, BC, Canada

Joule heating is simulated in COMSOL Multiphysics® software for the electro-thermal micro actuator. The aim is to choose the optimal design parameters ...

COMSOL Multiphysics® Software Simulation of a Dual-axis MEMS Accelerometer with T-Shaped Beams

C. Zheng [1], X. Xiong [1], J. Hu [2]
[1] Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
[2] Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA

Introduction: Inertial navigation requires acceleration measurement along all three degree-of-freedoms. Most accelerometers are designed to measure ...

Nanowire Based Flexible Piezoelectric Sensor for Structural Health Monitoring Applications

A. El Kacimi [1], E. Pauliac-Vaujour [1], J. Eymery [2]
[1] University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
[2] University Grenoble Alpes, CEA, Grenoble, France

We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal ...

MEMS Based Silicon Load Cell for Weighing Applications

D. Chauhan[1], B. D. Pant[2]
[1]Kurukshetra University, Kurukshetra, Haryana, India
[2]CSIR- Central Electronics Engineering Research Institute, Pilani, Rajasthan, India

Load cells are force sensors, which are used in weighing equipment. The objective of this work is to develop MEMS based load cell. In this work two ...

Surface Acoustic Wave Based MEMS Resonator

S. Dixit[1], R. C. Jain[1]
[1]Jaypee Institute of Information Technology, Noida, Uttar Pradesh, India

Surface Acoustic Waves (SAW) is the acoustic wave that propagates along the surface of the substrate with amplitude decaying exponentially away from ...

Simulation of ZnO Enhanced SAW Gas Sensor

H. du Plessis[1], W. Perold[1]
[1]University of Stellenbosch, Stellenbosch, South Africa

Surface acoustic wave (SAW) devices are widely used for their sensing capabilities and gas sensing is only one of many uses. There is an ever ...

MEMS Electrostatic Acoustic Pixel

A. Arevalo [1], D. Conchouso [1], D. Castro [1], I. G. Foulds [2],
[1] Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2] The University of British Columbia, School of Engineering, Vancouver, BC, Canada

The growth of the electronics industry demand better components for the electronic systems. Such components need to be improve to keep up with the ...

Piezoelectric Surface Acoustic Wave (SAW) Device with Simulated Poling Condition

R. Xu [1], M. Guizzetti [1], K. Astafiev [1], E. Ringgaard [1], T. Zawada [1],
[1] Meggitt A/S, Kvistgaard, Denmark

FEM (Finite Element Method) modelling software such as COMSOL Multiphysics® can be a powerful tool for modelling the behavior and response of ...