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Residual Stress in the Silicon Membrane of Circular CMUT

A. T. Galisultanov [1], P. Le Moal [1], V. Walter [1], G. Bourbon [1],
[1] FEMTO-ST, Besanson, France

During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely fast [1-2]. CMUT is an attractive ...

Design and Simulation of a MEMS-Based Flow Sensor Using COMSOL Multiphysics® Software

P. Saikumar [1], Z. C. Alex [1], D. Rajapan [2],
[1] VIT University, Vellore, Tamilnadu, India.
[2] National Institute of Ocean Technology (NIOT), Pallikaranai, Chennai, Tamilnadu, India

A flow sensor based on calorimetric principle is designed using COMSOL Multiphysics® software. The sensor is capable of measuring the velocity from 0 ...

Study of Fluid and Mass Adsorption Model in the QCM-D Sensor for Characterization of Biomolecular Interaction

H.J. Kwon[1], C.K. Bradfield[1], B.T. Dodge[1], and G.S. Agoki[1]
[1]Department of Engineering and Computer Science, Andrews University, Berrien Springs, Michigan, USA

Increasing attention has been paid to application of the quartz crystal microbalance with dissipation (QCM-D) sensor for monitoring biomolecular ...

Design for Reliability and Robustness through Probabilistic Methods in COMSOL Multiphysics with OptiY

T.-Q. Pham[1], H. Neubert[2], and A. Kamusella[2]
[1]OptiY e.K., Aschaffenburg, Germany
[2]Institute of Electro-Mechanical and Electronic Design, TU Dresden, Germany

One challenge in designing micro-electromechanical systems (MEMS) is considering the variability of design parameters caused by manufacturing ...

FEM Based Estimation of Biological Interaction Using a Cantilever Array Sensor

S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Coimbatore
Tamil Nadu, India

In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, ...

Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm

S.Manikandan[1], R.Radeep krishna[1]
[1]Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India

The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical ...

FEM Modeling in Robust Design for Graphene-Based Electromagnetic Shielding

S. Elia [1], G. Granata [1], P. Lamberti [1], V. Tucci [1],
[1] University Of Salerno, Italy

Electromagnetic shielding design is usually approached referring to nominal values of the main parameters. This could lead to malfunctioning devices ...

Design, Simulation and Optimization of Bimorph Piezoelectric Energy Harvester

T. Desai [1], R. Dudhe [1], S. Ayyalusamy [1],
[1] Manipal University, Dubai, UAE

Piezoelectric energy conversion has received great attention for vibration-to-electric energy conversion over the last five years. A typical ...

Detection of Magnetic Particles by Magnetoresistive Sensors

A. Weddemann[1], A. Auge[1], F. Wittbracht[1], C. Albon[1], and A. Hütten[1]
[1]Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany

In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics ...

Study of Fluid Dynamics and Heat Transfer in MEMS Structures

S. N. Das[1], G. Bose[2]
[1]Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
[2]Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India

This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat ...