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Design and Analysis of MEMS Micro Mirror using Electro Thermal Actuators

L. Sujatha[1], D. K. Balasubramanian[2], V. S. Selvakumar[1]
[1]Rajalakshmi Engineering College, Chennai, India
[2]University of Central Florida, Orlando, Florida, United States

Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors ...

Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics

R.Yogeswari[1], S.Venkateshwaran [1], K.Umapathi[1]
[1]United Institute of Technology,Coimbatore,Tamil Nadu, India

Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million ...

Design of Novel Recirculation System for Slow Reacting Assays in Microfluidic Domain

N.N. Sharma, and A. Tekawade
Mechanical Engineering Group, Birla Institute of Technology & Science, Pilani, Rajasthan, India

A simple design for a microfluidic flow system for use in mixing or reacting assays with limited sample availability has been proposed and analyzed ...

A Methodology For The Simulation Of MEMS Spiral Inductances Used As Magnetic Sensors

S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium

In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the ...

Design and Characterization of a Novel High-g Accelerometer

S. Heß, R. Külls, and S. Nau
Fraunhofer Ernst-Mach-Institut
Efringen-Kirchen, Germany

The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting ...

Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications

K. Umapathi[1], K. Sukirtha[2], C. Sujitha[2], K. A. Noushad[2], Venkateswaran[1], R. Poornima[1], R. Yogeswari[1]
[1]United Institute of Technology, Coimbatore, Tamil Nadu, India
[2]Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India

The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent ...

AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new

K. Park[1], S. Hamian[1], A. M. Gauffreau[2], T. Walsh[2]
[1]Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
[2]Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA

This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the ...

Simulation of Thermal Sensor for Thermal Control of Satellite Using COMSOL Multiphysics

G. Mangalgiri
BITS Pilani K K BIRLA GOA CAMPUS
Zuarinagar
Goa, India

The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature ...

Ferromagnetic Materials for MEMS- and NEMS-Devices

A. Weddemann, J. Jadidian, S. Khushrushahi, Y. Kim, and M. Zahn
Research Laboratory of Electronics
Massachusetts Institute of Technology
Cambridge MA

The modeling of ferromagnetic materials is a challenging task of high industrial and academic impact. Thin film and granular systems form the basis of ...

Nanoscale Structure Design in EM Fields Using COMSOL Multiphysics

J. Yoo[1], H. Soh[2], J. Choi[3], S. Song[4]
[1]Department of Mechanical Engineering, Yonsei University, Korea
[2]Hyundai Motor Co., Korea
[3]Samsung Electronics Co., Ltd., Korea
[4]Mando Co., Korea

Nanoscale structural analysis and design is presented. All the simulations are carried out using a finite element solver and optimization is performed ...