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Design and Analysis of MEMS Micro Mirror using Electro Thermal Actuators

L. Sujatha[1], D. K. Balasubramanian[2], V. S. Selvakumar[1]
[1]Rajalakshmi Engineering College, Chennai, India
[2]University of Central Florida, Orlando, Florida, United States

Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors ...

Simulations of Micropumps Based on Tilted Flexible Structures - new

M. J. Hancock[1], N. H. Elabbasi[1], M. C. Demirel[2]
[1]Veryst Engineering, LLC., Needham, MA, USA
[2]Pennsylvania State University, University Park, PA, USA

Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed ...

Designing Piezoelectric Interdigitated Microactuators using COMSOL

O. Myers [1], M. Anjanappa [2], and C. Freidhoff [3]

[1] Mississippi State University, Mississippi State, MS, USA
[2] University of Maryland Baltimore County, Baltimore, MD, USA
[3] Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA

This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. ...

Design of High Performance Condenser Microphone Using Porous Silicon

S. Suganthi[1], M. Anandraj[2], and L. Sujatha[1]
[1]Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
[2]Department of Physics, Rajalakshmi Engineering College, Chennai, India

Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible ...

A Methodology For The Simulation Of MEMS Spiral Inductances Used As Magnetic Sensors

S. Druart, D. Flandre, and L.A. Francis
Université catholique de Louvain - ICTEAM, Louvain-la-Neuve, Belgium

In this paper, a methodology to simulate the electric behavior of spiral inductances is presented and discussed. All the methodology is built with the ...

Optimized Cantilever-to-Anchor Configurations of Buckled Cantilever Plate Structures for Transducer Applications

A. Arpys Arevalo Carreno[1], D. Conchouso Gonzalez[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

The mechanical simulation and analysis of the cantilever-to-anchor configuration for an out-of-plane structure used in transducer applications is ...

A Model of Electric Field Assisted Capillarity for the Fabrication of Hollow Microstructures

C. Tonry[1], M. K. Patel[1], C. Bailey[1], M. P.Y. Desmuliez[2], W. Yu[3]
[1]Computational Mechanics and Reliability Group (CMRG), School of Computing and Mathematical Sciences, University of Greenwich, London, United Kingdom
[2]Microsystems Engineering Centre (MISCEC, School of Engineering & Physical Sciences, Heriot Watt University, Earl Mountbatten Building, Edinburgh, United Kingdom
[3]State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin, China

Electric Field Assisted Capillarity (EFAC) is a novel technique for the fabrication of hollow polymer microstructures. It has advantages over current ...

Actively Controlled Ionic Current Gating In Nanopores

G. Zhang[1], S. Bearden[1]
[1]Clemson University, Clemson, SC, USA

It is necessary to understand and control nanopore behavior in order to develop biosensors for a variety of applications including DNA sequencing. The ...

Modeling Partially Absorbing Biosensors

D. Kappe[1], A. Hütten[1]
[1]Bielefeld University, Bielefeld, Germany

Designing and constructing a lab-on-a-chip device poses a variety of questions. Transport of all required substances, detection of the analyte and its ...

Motion of Uncharged Particles in Electroosmotic Flow through a Wavy Cylindrical Channel

N. Qudus[1], T. Mahbub[1], S. A. Ali[1], and M. Shajahan[1]
[1] Bangladesh University of Engineering and Technology, Dhaka Bangladesh

A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. ...