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Thermally Induced-Noise Reduction Using an Electrostatic Force Feedback

H. Lee, and J.V. Clark
Purdue University, West Lafayette, IN, USA

In this paper we present a method to mitigate the effect of thermally-induced noise in Micro-Electro-Mechanical Systems (MEMS) through a force feedback circuit. Inherent noise-induced vibrations, which would be inconsiderable in macro scale, are considered as a limitation in micro- and nano- scale since it diminishes the high performance of MEMS devices. For instance, depending on the stiffness ...

Powerful automation and optimization methods for Material- and Process analysis with COMSOL Multiphysics and Matlab

T. Frommelt
SGL Group, Technology & Innovation, Meitingen, Germany

Thomas Frommelt received his PhD in physics in 2007 from the University of Augsburg for experimental work and simulation analysis on acoustically driven microfluidic mixing. In 2008, he joined the SGL Group and introduced COMSOL Multiphysics as the tool for flexible equation based modelling. Since then, he has focused on carbon material and process simulation employing methods of optimization and ...

Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics

A. Frey
Siemens AG
Corporate Research & Technologies
Munich, Germany

Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...

High Coupling Factor Piezoelectric Materials for Bending Actuators: Analytical and Finite Elements Modeling Results

I.A. Ivan[1], M. Rakotondrabe[1], and N. Chaillet[1]
[1]FEMTO-ST Institute, University of Franche-Comte, Besançon, France

New giant piezoelectric factor materials such as PMN-PT and PZN-PT were researched during the last decade and are actually becoming commercially available. As they seem very attractive for actuator designs, we studied their potential in replacing PZT ceramics. In a first comparative approach, we tested a series of classic rectangular composite bimorph structures of different combinations of ...

Interfacing Continuum and Discrete Methods: Convective Diffusion of Microparticles and Chemical Species in Microsystems

J. Berthier
CEA-LETI, Department of Biotechnology, Grenoble, France

Convective transport of macromolecules or micro and nanoparticles in microsystems are usually predicted by solving the Navier Stokes equations for the carrier fluid and a concentration equation for the diffusing species. In the case of isolated particles or complicated geometries with extremely small apertures or microporous material, the concentration equation maybe replaced by a Monte Carlo ...

Design of High Performance Condenser Microphone Using Porous Silicon

S. Suganthi[1], M. Anandraj[2], and L. Sujatha[1]
[1]Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
[2]Department of Physics, Rajalakshmi Engineering College, Chennai, India

Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...

Efficient Generation of Surface Plasmon Polaritons with Asymmetric Nano-structures

J. Chen
Peking University
China

This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the ...

Effect of Fluid Conditions on Air-Liquid Interface in Hydrophobic Micro Textured Surface

S. Takahashi[1], S. Ogata[1]
[1]Tokyo Metropolitan University Hachioji City, Tokyo, Japan

We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...

Design, Fabrication and Simulation of Microchannel Network for MEMS

V. Jain[1], A. K. Sharma[2], P. Kumar[2]
[1]Thapar University, Patiala, Punjab, India
[2]Indian Institute of Technology Roorkee, Roorkee, Uttar Pradesh, India

The greatest challenge being faced for realization of Micro-Electro Mechanical System (MEMS) technology is the lack of a simple, quick and reliable method for the fabrication of 3-D microchannel in the range of micrometers. A novel fabrication technique which opens possibilities for the production of these microfluidic channels is presented in this paper. The present paper highlights the ...

The Effect of Electrochemical Micro-Milling by Rotating Magnetic Field

H-Y. Shen[1], H-P. Tsui[1], J-C .Hung[1], S-Y. Lin[2], and B-H. Yan[2]
[1]Metal Industries Research and Development Centre, Taichung, Taiwan
[2]National Central University, Chungli, Taiwan

In this work, the process of micro-channels in electrochemical micro-milling by using rotating magnet assisted helical tool is presented. The results show helical tool and Lorentz force of the rotating magnetic field that enhance the renewal of the electrolyte and machining efficiency. The feed rate can be raised under the magnetic field assisted in terms of experimental results; moreover, the ...

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