R. Berthelon , D. Dutartre , F. Andrieu 
 STMicroelectronics, France
 CEA Leti, France
The integration of high level of stress in field effect transistors is performed through incorporation of intrinsically strained SiGe layers. With the ...
O. Myers , M. Anjanappa , and C. Freidhoff 
 Mississippi State University, Mississippi State, MS, USA
 University of Maryland Baltimore County, Baltimore, MD, USA
 Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA
This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
F. Wittbracht, A. Weddemann, A. Auge, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we show that dipolar magnetic coupling can be used to control the particle flow through microfluidic structures without changing the ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for ...
D.A. Sanz Becerra, E.A. Unigarro Calpa, J. Osma, F. Segura
Universidad de los Andes, Bogotá, Colombia
A scheme for inductive wireless powering and readout of passive LC sensor is presented. The sensor’s inductor is designed as a planar square coil and ...
P. D. Hanasi, B. G. Sheeparamatti, B. B. Kirankumar
Basaveshwar Engineering College, Bagalkot, Karnataka, India
Micro cantilevers are the basic MEMS structures, which can be used both as sensors and actuators. The . The objective of this work is to study concept ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting ...
Siram Sai Krishna, Nuti Venkata Subrahmanya Ayyappa Sai, Dr.K.Srinivasa Rao
Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
Professor & HOD, Dept. of Electronics and Instrumentation Engineering, Lakireddy Bali Reddy College of Engineering, Mylavaram, Andhra Pradesh, India
The Micro electro mechanical systems (MEMS) technology provides us a platform to interface between mechanical and electrical components. In this paper, ...
AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the ...