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Simulation of MEMS Based Pressure Sensor for Diagnosing Sleep Disorders

J. Vijitha[1], S. S. Priya[1], K. C. Devi[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India

Sleep apnea is a type of sleep disorder characterized by pauses in breathing or instances of shallow or infrequent breathing during sleep. There is a ...

Finite Element Modeling of MEMS Chevron Thermal Actuators for Strain Engineering of Graphene

M. Vutukuru [1], J. Christopher [2], B. Goldberg [1,2], D. Bishop [1,2,3], A. Swan [1,2,3]
[1] Department of Electrical and Computer Engineering, Boston University, Boston, MA, USA
[2] Department of Physics, Boston University, Boston, MA, USA
[3] Division of Material Science Engineering, Boston University, Boston, MA, USA

Graphene, a single layer of carbon atoms, has demonstrated extremely high electric and thermal conductivities, tensile strength, and is therefore an ...

Design and Simulation of Capacitive Pressure Sensor for Condition Monitoring

S. Sushma[1], R. Surekha[1], K. J. Rudhresha[1], S. Sahu [1], S. Singh4 [1], S. L. Pinjare6 [1],
[1] Dept. of ECE, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India.

This poster focuses on the development of a capacitive pressure sensor for condition monitoring applications. One method to measure vibrations is to mount an pressure sensor on the vibrating machinery or object and measure the pressure exerted due to vibrations. Measured pressure level helps to detect any deviations from the normal conditions.

Modeling and Prediction of Line Pattern Collapse

D. Bassett[1], M. Carcasi[1], W. Printz[1]
[1]Tokyo Electron America, Austin, TX, USA

In semiconductor manufacturing, effective cleaning of structures with liquid is one of the most important and potentially difficult process steps. It ...

Quartz Transducer Modeling for Development of BAW Resonators

L.B.M. Silva[1], E.J.P. Santos[1]
[1]Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil

Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for ...

Multiphysics and Simulation of MEMS based Bolometer for Detecting the Radiations in Nuclear Power Plants

K. Umapathi[1], S. Swetha[2], K. Ranjitha[2], K. Vinodh[2], K. Deebiga[1], R. Harisudarsan[1]
[1]United Institute of Technology, Coimbatore, TamilNadu, India
[2]Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India

High performance micro sensors are important to detecting special nuclear materials radiations in different fields to save the globe. This paper is ...

Resonant Frequency Analysis of Quartz Shear Oscillator

T. Satyanarayana[1], V. Sai Pavan Rajesh[2]
[1]NPMASS Centre, Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India
[2]Lakireddy Bali Reddy Autonomous Engineering College, Mylavaram, Andhra Pradesh, India

The most commonly used type of resonator is the AT-cut, where the quartz blank is in the form of a thin plate cut at an angle to the optic axis of the ...

Surface Plasmon Resonance Dependence on Size in Metallic Nano-Spheres - new

K. Kluczyk[1], W. Jacak[1]
[1]Institute of Physics, Wrocław University of Technology, Wrocław, Poland

Surface plasmon resonance in metallic nanoparticles is highly and shape dependent, which enables varius applications in photovoltaics, photonics, ...

Simulation of an AlN Thin Film Resonator for High Sensitivity Mass Sensors

M. Maitra [1], H. B. Nemade [1], S. Kundu [1],
[1] Indian Institute of Technology Guwahati, Guwahati, Assam, India

The objective of this paper is to show the simulation of a piezoelectric thin film device and its application as a sensor. Piezoelectric aluminum ...

Studies of Lead Free Piezo-Electric Materials Based Ultrasonic MEMS Model for Bio sensor

P. Pattanaik[1], S. K. Kamilla[1], D. P. Das[2], S. K. Pradhan[3]
[1]MEMS Design Center, Institute of Technical Education & Research (ITER), Sikhya ‘O’ Anushandhan University, Bhubaneswar, Odisha, India
[2]Process Engineering and Instrumentation Lab, Institute of Minerals and Materials Technology (IMMT), Bhubaneswar, Odisha, India
[3]Dept of ECE, Hi-Tech Institute of Technology, Khurda, Odisha, India

This paper describes the design of an ultrasonic transducer using different lead free piezo-electric materials and evaluates their performance with ...