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Design and Analysis of MEMS Micro Mirror using Electro Thermal Actuators

L. Sujatha[1], D. K. Balasubramanian[2], V. S. Selvakumar[1]
[1]Rajalakshmi Engineering College, Chennai, India
[2]University of Central Florida, Orlando, Florida, United States

Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors ...

Nondestructive Testing of Composites Using Model Based Design

E. Nesvijski[1]
[1]ACOUSTICS@MBD CONSULTANTS, LLC, Westborough, MA, USA

There is a practical interest among composite materials manufacturers to high-speed accurate non-destructive evaluation (NDE) technology for voids ...

Capacitive Accelerometer Characteristics Study

B. S. Kavitha[1], S. B. Rudraswamy[1], C. R. Venugopal[1]
[1]SJCE, Mysore, Karnataka, India

This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material ...

Modelagem Computacional de Difusores para Microbombas

A. G. S. Barreto Neto [1], A. M. N. Lima [2], C. S. Moreira [1],
[1] Instituto Federal de Ciência e Tecnologia - IFPB, João Pessoa, PB, Brasil
[2] Universidade Federal de Campina Grande - UFCG, Campina Grande, PB, Brasil

Este trabalho trata do dimensionamento da estrutura bocal/difusor utilizando a simulação computacional com fronteira móvel. Esse tipo de simulação contempla toda estrutura da bomba, isto é, câmara de bombeamento, difusor e área de dispersão de fluxo, de modo a contabilizar o refluxo em função da estrutura, possibilitando um projeto mais realísticos da estrutura.

Finite Element Model of Surface Acoustic Wave Scattering with High-Aspect-Ratio Irregularities

S. Iuliia [1], Y. Sergey [1], K. Sergey [1], P. Alexey [1],
[1] Saratov State University, Saratov, Russia

The design of surface acoustic wave (SAW) devices needs the accurate study of the scattering fields, arising from the interaction of SAW with periodic ...

Variable Capacitance And Pull-In Voltage Analysis Of Electrically Actuated Meander-Suspended Superconducting MEMS

N. AlCheikh[1], P. Xavier[1], J.M. Duchamp[1], C.H. Boucher[2], and K. Schuster[2]
[1]Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Minatec, Grenoble, France
[2]Institute of Millimetric Radio Astronomy (IRAM), Grenoble, France

Variable capacitors between the fF and pF range are very interesting for high frequency applications like variable filters, resonators, etc. For radio ...

COMSOL Multiphysics Applied to MEMS Simulation and Design

Dr. Piotr Kropelnicki[1]
Mu Xiao Jing[1]
Wan Chia Ang[1]
Cai Hong[1]
Andrew B. Randles[1]

[1]Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore

In this research, we performed multiple COMSOL Multiphysics® simulations. We analyzed the dispersion curves of waves in a LAMB wave pressure sensor; ...

Simulation of Piezoelectrically Actuated Drug Delivery Device for Biomedical Application

J. Dsa[1], Manisha[1], M. Goswami [1], B.R Singh [1],
[1] Indian Institute of information technology Allahabad, Allahabad, Uttar Pradesh, India

We have developed a piezoelectrically controlled MEMS drug delivery device for on-demand release of defined quantities of drug. A drug-loaded micro ...

Designing the Actuator for the Next-Generation Astronomical Deformable Mirrors: a Multidisciplinary and Multiphysics Approach

C. Del Vecchio[1], R. Biasi[2] , D. Gallieni[3], and A. Riccardi[1]

[1]INAF-OAA, Fierenze, Italy
[2]Microgate Srl, Bolzano, Italy
[3]ADS International Srl, Valmadrera, Italy

The actuation system of the deformable mirror is one of the crucial components of an Adaptive Optics unit. One possible implementation comprehends a ...

Design and Simulation of MEMS Based Gyroscope for Vestibular Prosthesis

R. Nithya[1], K. Kavitha[1], R. K. Shahana[1], A. Gupta[1], M. Alagappan[1]
[1]Department of Biomedical Engineering, PSG College of Technology, Coimbatore, Tamilnadu, India

The primary function of the vestibular system is to provide the brain with information about the body\'s motion and orientation. The absence of this ...