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Modeling and Prediction of Line Pattern Collapse

D. Bassett[1], M. Carcasi[1], W. Printz[1]
[1]Tokyo Electron America, Austin, TX, USA

In semiconductor manufacturing, effective cleaning of structures with liquid is one of the most important and potentially difficult process steps. It ...

Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy

L. S. Sundharam[1]
[1]Kumaraguru college of Technology, Coimbatore, Tamil nadu, India

The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array ...

Two-axis Analysis of Micromirror Using Electrothermal Actuators For Optical Switching Applications

B.Bharanipriyaa[1], V.S.Selvakumar[1], L. Sujatha[1]
[1] National MEMS Design Center, Rajalakshmi Engineering College, Thandalam, Chennai,Tamil Nadu, India

Micro Mirrors is a versatile device which has been gaining popularity and this finds application in fields such as optical switching, display and in ...

Magnetic Nanoparticles for Novel Granular Spintronic Devices

A. Regtmeier[1], A. Weddemann[2], I. Ennen[3], and A. Hütten[1]
[1]Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
[2]Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
[3]Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria

Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identi fied them as components ...

Design and Characterization of a MEMS Varactor

V. S. Nagaraja, N. Suma, and S. L. Pinjare
Nitte Meenakshi Institute of Technology

The tunable capacitor (variable capacitor) is one of the most important and components in filters, Phase shifters, VCO etc. A tunable capacitor can ...

Detection of Magnetic Particles by Magnetoresistive Sensors

A. Weddemann[1], A. Auge[1], F. Wittbracht[1], C. Albon[1], and A. Hütten[1]
[1]Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany

In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics ...

Analysis of Electroosmotic Flow of Power-law Fluids in a Microchannel(1D)

K. SriNithin[1]
[1]IIT Kharagpur, Kharagpur, West Bengal, India

Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy ...

Simple Finite Element Model of the Topografiner - new

H. Cabrera[1], D. A. Zanin[1], L. G. De Pietro[1], A. Vindigni[1], U. Ramsperger[1], D. Pescia[1]
[1]Laboratory for Solid State Physics, ETH Zürich, Zürich, Switzerland

In our recent experiments we are revisiting the topografiner technology for the imaging of surface topography with a resolution of a few nanometers. In ...

The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new

H. B. Nemade[1]
[1]Indian Institute of Technology Guwahati, Guwahati, Assam, India

The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when ...

Mathematical Modeling of Zig-Zag Traveling-Wave Electro-Osmotic Micropumps

J. Hrdlicka[1], P. Cervenka[1], M. Pribyl[1], and D. Snita[1]
[1]Department of Chemical Engineering, Institute of Chemical Technology Prague, Prague, Czech Republic

In this paper we present results of the mathematical modeling of AC electroosmotic micropumps. Unlike others we use the full dynamic description, ...