Primary Current Distribution Model for Electrochemical Etching of Silicon through a Circular Opening - new
A. Ivanov , U. Mescheder ,
 Hochschule Furtwangen University, Furtwangen im Schwarzwald, Germany
Primary current distribution model for anodization of low-doped p-type silicon through a circular opening in frontside insulating mask is developed. ...
A. Arevalo , J. Prieto , M. M. Hussain , I. G. Foulds ,
 Computer, Electrical, & Mathematical Sciences & Engineering, King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Vancouver, BC, Canada
The role of stretchable electronics systems allows the design of new reconfigurable macro-electronics, that extends a device capability to function as ...
Design and Simulation of A MEMS Based Horseshoe Shaped Low Current Lorentz Deformable Mirror (LCL-DM) - new
B. Park , T. Chen , C. Shafai ,
 Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
This poster presents the design and analysis of a novel horseshoe shaped MEMS actuator for adaptive optics. The actuation mechanism is Lorentz force ...
A. El Kacimi , E. Pauliac-Vaujour , J. Eymery 
 University Grenoble Alpes, CEA, LETI, MINATEC Campus, Grenoble, France
 University Grenoble Alpes, CEA, Grenoble, France
We report on the modeling of flexible piezoelectric capacitive sensor based on GaN wires grown by Metal Organic Vapor Phase Epitaxy. Single crystal ...
H. J. Hall , L. A. Starman ,
 Sensors Directorate, Air Force Research Laboratory, Wright-Patterson AFB, OH, USA
Beam steering and adaptive optics micromirror applications commonly demand optically flat surfaces with minimal mass. When reflective coatings ...
A. Arevalo , J. P. Rojas , D. Conchouso , M. M. Hussain , I. G. Foulds 
 Computer, Electrical and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal, Saudi Arabia
 The University of British Columbia, School of Engineering, Okanagan Campus, Canada
Energy efficiency and harvest, speed and performance, flexibility and portability are key elements for innovation in the current consumer electronics ...
M. I. Hassan , A. Brimmo , A. N. Chatterjee ,
 Masdar Institute of Science and Technology, Abu Dhabi, UAE
 MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore
The multilayer composite single mass cantilever is a MEMS energy harvester structure. The vibrating structure is under vacuum in hermetic MEMS. ...
A. T. Galisultanov , P. Le Moal , V. Walter , G. Bourbon ,
 FEMTO-ST, Besanson, France
During last twenty years capacitive micromachined ultrasonic transducers (CMUT) have been developed extremely fast [1-2]. CMUT is an attractive ...
COMSOL Multiphysics® Software Simulation of a Dual-axis MEMS Accelerometer with T-Shaped Beams - new
C. Zheng , X. Xiong , J. Hu 
 Department of Electrical and Computer Engineering, University of Bridgeport, Bridgeport, CT, USA
 Department of Mechanical Engineering, University of Bridgeport, Bridgeport, CT, USA
Introduction: Inertial navigation requires acceleration measurement along all three degree-of-freedoms. Most accelerometers are designed to measure ...
Simulation of the Impedance Response of Thin Films as a Function of Film Conductivity and Thickness - new
Y. Jin , S. Kumar , R. A. Gerhardt ,
 School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA, USA
1. Introduction The electrical properties of materials are important in many different applications. In microelectronics for example, films must ...