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µHeater on a Buckled Cantilever Plate for Gas Sensor Applications

A. Arpys Arevalo Carreno[1], E. Byas[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

In semiconductor gas sensors, the base of the gas detection is the interaction of the gaseous species at the surface of the semiconducting sensitive ...

Optimized Cantilever-to-Anchor Configurations of Buckled Cantilever Plate Structures for Transducer Applications

A. Arpys Arevalo Carreno[1], D. Conchouso Gonzalez[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Mecca, Kingdom of Saudi Arabia

The mechanical simulation and analysis of the cantilever-to-anchor configuration for an out-of-plane structure used in transducer applications is ...

Multiphysics Simulations for the Design of Probe-Heads Micro-Needles

A. Corigliano[1], A. Courard[1], G. Cocchetti[1], P. Gagliardi[1], L. Magagnin[1], R. Vallauri[2], D. Acconcia[2]
[1]Politecnico di Milano, Milano, Italy
[2]Technoprobe, Cernusco Lombardone, Italy

The paper presents recent results concerning the experimental mechanical characterization, the numerical modeling and the design of micro-needles used ...

Simulations of Micropumps Based on Tilted Flexible Structures - new

M. J. Hancock[1], N. H. Elabbasi[1], M. C. Demirel[2]
[1]Veryst Engineering, LLC., Needham, MA, USA
[2]Pennsylvania State University, University Park, PA, USA

Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed ...

The Origin of Mass-change Sensitivity within Multi-layered, Non-uniform, Piezoelectrically-actuated Millimeter-sized Cantilever (PEMC) Biosensors: Vibrational Analysis through Experiment and Finite Element Modeling (FEM)

B.N. Johnson[1], and R. Mutharasan[1]

[1]Department of Chemical and Biological Engineering, Drexel University, Philadelphia, Pennsylvania, USA

A 3D finite element model (FEM) of the PEMC sensor was developed to characterize the modes of vibration that have demonstrated high sensitivity to mass ...

Designing Piezoelectric Interdigitated Microactuators using COMSOL

O. Myers [1], M. Anjanappa [2], and C. Freidhoff [3]

[1] Mississippi State University, Mississippi State, MS, USA
[2] University of Maryland Baltimore County, Baltimore, MD, USA
[3] Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA

This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. ...

Finite Element Modeling of the Stress Field in a Cell-Seeded Microchannel

G. Zhu, and Y. Li
Lawrence Technological University, Southfield, MI, USA

Fluids used in biomedical microelectromechanical systems (BioMEMS) devices often exhibit very different flow behavior from those in bulk solutions, ...

Robust and Reliability-based Design Optimization of Electromagnetic Actuators Using Heterogeneous Modeling with COMSOL Multiphysics and Dynamic Network Models

H. Neubert[1], A. Kamusella[1], and T-Q. Pham[2]
[1]Technische Universität Dresden, Germany
[2]OptiY e. K. Aschaffenburg, Germany

For an exemplary electromagnetic actuator used to drive a Braille printer, a design optimization was performed. The optimization involves stochastic ...

Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements

S. Cerimovic[1], R. Beigelbeck[2], H. Antlinger[3], J. Schalko[2], B. Jakoby[3], and F. Keplinger[1]
[1]Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
[2]Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
[3]Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria

A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features ...

A Wide Range MEMS Vacuum Gauge Based on Knudsen’s Forces

V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
Chennai, India

A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based ...