论文和技术资料

N. Mahmoodi[1], C. J. Anthony[1]
[1]University of Birmingham, Birmingham, UK

M. I. Hassan [1], A. Brimmo [1], A. N. Chatterjee [2],
[1] Masdar Institute of Science and Technology, Abu Dhabi, UAE
[2] MEMS Department, GLOBALFOUNDRIES, Singapore, Singapore

Ali Dahaghin¹, Milad Salimibani¹, Agnieszka Boszczyk¹, Agnieszka Jozwik¹, Damian Siedlecki^1
1Department of Optics and Photonics, Wroclaw University of Science and Technology, Wroclaw, Poland

Beatrice Carasi¹, Lucrezia Guarino¹, Lucia Zullino¹, Luca Cecchetto^1
1STMicroelectronics

Roland Rozsnyo¹, Gaetan Simonnot^1
1hepia, HES-SO Geneva, University of Applied Sciences and Arts Western Switzerland

Dario Cinanni^1
1ASK Industries S.p.A.

S. Gorelick[1], M. Leivo[1], U. Kantojärvi[1]
[1]VTT Technical Research Centre of Finland, Espoo, Finland

R.Christensen, and U. Skov
iCapture ApS
Gadstrup, Denmark

Giorgos Kakolyris¹, Dilek Bulut², Norbert Bader³, Ron van Ostayen^1
1Department of Precision and Microsystems Engineering, Delft University of Technology
²Department of Precision and Microsystems Engineering, Delft University of Technology
³Faculty of Engineering Technology, University of Twente

Luigi Lentini^1
1Politecnico di Torino