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Folded Beam MEMS Structure

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Hi All,

I have set up a folded beam MEMS structure. The simulations runs fine (For solid mechanics physics), but I am having an error with regards to varying the load applied to a the moving comb electrode. This is only using the the solid mechanics physics at the moment.

Ultimately what I am trying to find is to get table of Spring Constants (k) for a given Force (F) for this stricture.



0 Replies Last Post 2016年5月6日 GMT-4 05:25
COMSOL Moderator

Hello Sivaharan Rajkumar

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