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How to Simulate Magnetostatic without Singular matrix error
Posted 2017年8月9日 GMT-4 04:14 Low-Frequency Electromagnetics, Modeling Tools & Definitions, Parameters, Variables, & Functions Version 5.3 1 Reply
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I want to simulate Magnetostatic type to applied to DC Magnetron Sputter.
So, I modeled Permanent magnet, Yoke, Back-Plate, Target which are made of DC Magnetron Sputter.
then, i did it as below
1. I insert input value according to each material (Permanent Magnet-0.4Tesla, BackPlate-Copper, Target, Yoke - Aluminum).
2. In magnetic Fields, No Currents(mfnc), i set to Magnetic Flux conversion and Zero Magnetic Scalar Potential only.
3. In mesh, i click the Extremely fine in Free Tetrahedral.
4. Finally, In Study tab, I clear check box of "generate default plots" (this is imitate of tutorial file of "Permanent Magnet" provided from COMSOL website).
in this, the error "Singular matrix" is generated and i don't know how to solve it.
Please help how i do.
So, I modeled Permanent magnet, Yoke, Back-Plate, Target which are made of DC Magnetron Sputter.
then, i did it as below
1. I insert input value according to each material (Permanent Magnet-0.4Tesla, BackPlate-Copper, Target, Yoke - Aluminum).
2. In magnetic Fields, No Currents(mfnc), i set to Magnetic Flux conversion and Zero Magnetic Scalar Potential only.
3. In mesh, i click the Extremely fine in Free Tetrahedral.
4. Finally, In Study tab, I clear check box of "generate default plots" (this is imitate of tutorial file of "Permanent Magnet" provided from COMSOL website).
in this, the error "Singular matrix" is generated and i don't know how to solve it.
Please help how i do.
1 Reply Last Post 2017年8月10日 GMT-4 05:10
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Posted:
7 years ago
Have you included an air (or vacuum) domain surrounding your magnetron? This is required for electromagnetic problems in order to create a finite region within which the problem can be solved.
Mark
Mark