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Simulating sputtering process

Posted 2017年12月25日 GMT-5 01:24 Electromagnetics 0 Replies

Shay Tirosh
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Dear COMSOLers Is it possable to simulate co-sputtering (multiple targests) process and to provide data on composition, thikness and dencity of the thin deposited films? what kind of mode do I use in COMSOL: Plasma? then how to describe the deposition

Thanks Shay

0 Replies Last Post 2017年12月25日 GMT-5 01:24
COMSOL Moderator

Hello Shay Tirosh

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