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TED in MEMS resonator
Posted 2012年6月20日 GMT-4 09:41 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Structural Mechanics Version 4.2a 2 Replies
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Hi
I am new to COMSOL. I was trying the Thermoelastic damping in MEMS resonator model [it was done on 3.5 but my version is 4.2a] provided by the comsol. Although I get the similar eigenfrequencies but not getting any Q-factor [shows error] value nor the temperature distribution correctly. How to evaluate the Q factor for TED in COMSOL? Also can some please explain the TED modelling in comsol?
Any help on TED would be appreciated. Thanks
I am new to COMSOL. I was trying the Thermoelastic damping in MEMS resonator model [it was done on 3.5 but my version is 4.2a] provided by the comsol. Although I get the similar eigenfrequencies but not getting any Q-factor [shows error] value nor the temperature distribution correctly. How to evaluate the Q factor for TED in COMSOL? Also can some please explain the TED modelling in comsol?
Any help on TED would be appreciated. Thanks
2 Replies Last Post 2012年11月16日 GMT-5 12:41