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Material setting for silicon-based piezoelectric MEMS resonators
Posted 2022年10月26日 GMT-4 03:34 0 Replies
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I am doing the simulation of the silicon MEMS piezoelectric resonator, but I have encountered difficulties in the anisotropy setting of silicon, and the results of two-dimensional simulation and three-dimensional simulation are different, the results of three-dimensional simulation are not ideal, is there also someone doing the simulation of MEMS piezoelectric resonator? Hope I can learn from you.
Hello 泽鑫 孙
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