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Modeling CCP Reactor
Posted 2022年10月26日 GMT-4 23:38 Plasma Physics, Modeling Workflow Version 6.0 2 Replies
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Hello, I am designing a Capacitively Coupled Plasma reactor in a 2D Axisymmetric Plasma, Time Periodic model. Unfortunately, I am facing an error whenever I try to compute the study. I am also a little bit confused about the connection of the electrodes. I am attaching my work as well as a photo of error along with this query. It would be really great if someone suggested what to do to me. Thank You!
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In the model file, I suggest you do some of the following:
Check the applied voltage format defined in the parameter in the model file.
Please refer to the following example to compare cross section data with plasma settings.
It is also a good idea to reconfigure the mesh.
https://www.comsol.com/model/gec-ccp-reactor-argon-chemistry-55011
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Dear Sir, First of all, thanks a lot for your suggestion. According to your instructions, I have made changes to the parameters and cross section data of plasma. I have also been reconfiguring the mesh frequently. Unfortunately, I am facing these errors with my work.
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