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How to mesh very thin films/ layers in MEMS switches? How to make use of scale geometry option in Meshing section?
Posted 2013年12月1日 GMT-5 11:55 MEMS & Nanotechnology, RF & Microwave Engineering, MEMS & Piezoelectric Devices, Geometry, Mesh, Structural Mechanics Version 4.2a, Version 4.3, Version 4.3a, Version 4.3b, Version 5.2 2 Replies
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The problem I am facing is on meshing the thin features in the structure.
The top electrode and bottom electrode are each 2um thick. There is a dielectric layer of 5nm thickness on top of the bottom layer. There is an air gap of 2um. The width and height of the beam are 100um each. What is the best method to mesh this kind of a structure?
Thanks in advance.
Hello Sarath Gopalakrishnan
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I want to run electromechanical simulations on MEMS double clamped structure.
The problem I am facing is on meshing the thin features in the structure.
The top electrode and bottom electrode are each 2um thick. There is a dielectric layer of 5nm thickness on top of the bottom layer. There is an air gap of 2um. The width and height of the beam are 100um each. What is the best method to mesh this kind of a structure?
Thanks in advance.
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Did you figure it out? I have a model pretty much the same as yours and I cannot get a good enough mesh for it. Thanks for your sharing!