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Thermal expansion effects of the gas inside the MEMS pressure sensor

Posted 2015年5月27日 GMT-4 12:28 MEMS & Nanotechnology, Fluid & Heat, MEMS & Piezoelectric Devices, Computational Fluid Dynamics (CFD), Microfluidics, Geometry, Studies & Solvers 0 Replies

Chin Fu Kuo
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Hi,
I want to simulate the thermal expansion effects of the gas inside the MEMS pressure sensor.
What should I do in the case of the MEMS capacitive pressure sensor tutorial example.

Thanks a lot
0 Replies Last Post 2015年5月27日 GMT-4 12:28
COMSOL Moderator

Hello Chin Fu Kuo

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