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resonace curve
Posted 2009年9月30日 GMT-4 08:21 1 Reply
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Hi all
I am modelling a mems cantilever beam. can anybody please help me get a resonace curve (amplitude of vibration Vs frequency) for electrostatic actuation of cantilever.
I am modelling a mems cantilever beam. can anybody please help me get a resonace curve (amplitude of vibration Vs frequency) for electrostatic actuation of cantilever.
1 Reply Last Post 2009年9月30日 GMT-4 09:52
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Posted:
2 decades ago
Hi
a quick partial reply:
An eigenfreuiqncy scan has no enegy limit on input and no (almost) damping hence the amplitude should theoreticaly go to infinity, therefore they are normalised but this would not tell you absolute values, only relative
When coupling electrostatic actuation you will have the same limitation if you do not add some damping, easist structural (see damping parameter o the material) or some air-film damping in MEMS mode but this is more complex.
Then yopu perform i.e. an harmonic amnalysis with the frequency as parameter (run an eigemode analysis first to find the modes of interest) around the frequency of interst.
tere are several models in the model gallery on the web, in the programme or in the documentation that covers similar approaches
Good luck
Ivar
a quick partial reply:
An eigenfreuiqncy scan has no enegy limit on input and no (almost) damping hence the amplitude should theoreticaly go to infinity, therefore they are normalised but this would not tell you absolute values, only relative
When coupling electrostatic actuation you will have the same limitation if you do not add some damping, easist structural (see damping parameter o the material) or some air-film damping in MEMS mode but this is more complex.
Then yopu perform i.e. an harmonic amnalysis with the frequency as parameter (run an eigemode analysis first to find the modes of interest) around the frequency of interst.
tere are several models in the model gallery on the web, in the programme or in the documentation that covers similar approaches
Good luck
Ivar