Daniel Smith
COMSOL Employee
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Posted:
1 decade ago
2010年11月1日 GMT-4 15:57
Hi Evgeniy, the plasma module solves a pair of drift diffusion equations for the electron density and mean electron energy, an extended form of the Maxwell-Stefan equations for the ions and neutrals and Poisson's equation for the electrostatic potential. For inductively coupled plasmas an additional PDE is solved for the magnetic vector potential. For microwave plasmas the wave equation is also solved.
The equations and boundary conditions are all detailed in the Plasma Module user's guide.
Hi Evgeniy, the plasma module solves a pair of drift diffusion equations for the electron density and mean electron energy, an extended form of the Maxwell-Stefan equations for the ions and neutrals and Poisson's equation for the electrostatic potential. For inductively coupled plasmas an additional PDE is solved for the magnetic vector potential. For microwave plasmas the wave equation is also solved.
The equations and boundary conditions are all detailed in the Plasma Module user's guide.