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Modeling thin film structure with spring foundation.

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Hi, I'm going to model thin film structure to do mode analysis.

I want to see the mode shape of the top of the thin film. I need your help.

My model information is as follows

Substrate : 5mm * 5mm * 750[um]

Thin film : 5mm * 5mm * 100[nm]

Between substrate and thin film, I'm going to put sping foundation.

And then fix the bottom of substrate, do mode analysis.

Right now, I'm using solid mechanics. However, other people said that shell or membrane is better. If it does, could you let me know how to model with shell or membrane?

PS. If you need more information, I'll give it to you as much as possible.

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Jongsung Kim


0 Replies Last Post 2018年4月10日 GMT-4 16:34
COMSOL Moderator

Hello Jongsung Kim

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