Menu

Discussion Forum

New Discussion
查找

Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

capacitive pressure sensor model

Posted 2012年3月6日 GMT-5 11:32 MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Studies & Solvers, Structural Mechanics Version 3.5a, Version 4.2 0 Replies

Bahar
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hi

I have a question about 2D capacitive pressure sensor model. I can not understand the role of Trapezoidal part in its structure. Is this considered to be a vacuum? for reference pressure? Also I can not understand where exactly the pressure will be applied? I mean should we consider that small air gap is the place where different pressures should be applied to? or the pressure will be applied on top of that air gap (in trapezoidal region) [although based on deformation it doesn't seems correct). I would be really grateful if someone can give me a bit of explanations.

Best
Bahar
0 Replies Last Post 2012年3月6日 GMT-5 11:32
COMSOL Moderator

Hello Bahar

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content