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Frequency response depending on the size of acoustic domain
Posted 2021年1月24日 GMT-5 11:43 MEMS & Nanotechnology, Piezoelectric Devices, Acoustics & Vibrations Version 5.6 4 Replies
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Hi!
I am working on a pMUT MEMS device. It consists of piezoelectric (AlN) sandwiched between two Al electrodes with a Si3N4 passive layer. The COMSOL model consists of the pMUT device and spherical pressure acoustics water domain. My goal is to observe and optimize the resonant frequency of the system.
Water domain - pressure acoustic domain (please see attached image and .mph document):
- PML outer layer (size is 10% of the radius of pressure acoustic domain)
- Viscous fluid model (with default viscosity, desity and speed of sound values for water)
- Exterior field calculation - boundary between pressure acoustic domain and PML (full integral)
- Spherical wave propagation - boundary on the edge of PML
Study: Frequency sweep (1MHz to 10MHz, step 1kHz)
Problem: When changing the size (radius) of the pressure acoustic domain I obtain multiple coupled-oscillator-like responses. I expected coupled oscillator response, but not multiple peaks. And when increasing the size of the radius, more oscillation curves can be observed (see attached image).
My goal is to create a scale-able acoustic domain model, mainly to simulate the pressure distribution at distances > 1cm from the pMUT. I have tried to resolve this problem for the past month and have tried several different model varieties, but with no success. I do not know what am I missing out, that is why I am asking for opinion you guys, maybe someone could explain this behaviour and how to resolve it.
Thank you all in advance!
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