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ICP. Capacitive coupling between coil and plasma

Posted 2012年5月3日 GMT-4 03:31 Plasma Physics Version 4.2a 0 Replies

Andrey Uvarov
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Hello!

I would like to simulate Inductively Coupled Plasma source.
One of the well-known features of such plasma sources is that in particular operating conditions power is transferred to the plasma mainly through capacitive coupling.

Does anyone can clarifiy if COMSOL ICP module takes capacitive coupling into account?

If not, is there a way how to handle with this problem?


Thanks!

0 Replies Last Post 2012年5月3日 GMT-4 03:31
COMSOL Moderator

Hello Andrey Uvarov

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