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Parallel Plate Capacitor
Posted 2012年6月13日 GMT-4 16:40 MEMS & Nanotechnology, MEMS & Piezoelectric Devices 4 Replies
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This is my first time using Comsol. My project is to model the capacitance of a system with the dimensions as follows:
Top Electrode: 2e-3m x 2e-3m x 100e-9m
Silicon Substrate: 2e-3m x 2e-3m x 2e-6m
Gap: 1e-6m
Bottom plate: 3.5e-3m x 3.5e-3m x 2e-6m
Bottom Electrode: 3.5e-3m x 3.5e-3m x 100e-9m.
Because Comsol cannot automatically mesh over these dimensions, I decided to reduce the system down into something Comsol could mesh first. Then I would build the 2e-3 and 3.5e-3m dimensions from this smaller one.
These dimensions are:
Top/Bottom Electrodes: 1e-4m x 1e-4m x 100e-9m
Top/Bottom Substrates: 1e-4m x 1e-4m x 2e-6m
Gap: 1e-6m
I managed to get Comsol to solve this system by following the documentation for the Capacitive 3D Comb Drive:
file:///C:/COMSOL35/doc/mems/wwhelp/wwhimpl/common/html/wwhelp.htm#href=memsactuatormodels.18.4.html&single=true
When I try to add another version of the above system by using Copy+Paste, the array tool, or the mirror tool, Comsol will not mesh this structure either (Error 4100). I tried using the "Interactive Meshing" feature and meshed each boundary, but then I get Error 7067: System Matrix is 0.
I would appreciate any help and suggestions anyone has... I've been stuck on this problem a while.
Top Electrode: 2e-3m x 2e-3m x 100e-9m
Silicon Substrate: 2e-3m x 2e-3m x 2e-6m
Gap: 1e-6m
Bottom plate: 3.5e-3m x 3.5e-3m x 2e-6m
Bottom Electrode: 3.5e-3m x 3.5e-3m x 100e-9m.
Because Comsol cannot automatically mesh over these dimensions, I decided to reduce the system down into something Comsol could mesh first. Then I would build the 2e-3 and 3.5e-3m dimensions from this smaller one.
These dimensions are:
Top/Bottom Electrodes: 1e-4m x 1e-4m x 100e-9m
Top/Bottom Substrates: 1e-4m x 1e-4m x 2e-6m
Gap: 1e-6m
I managed to get Comsol to solve this system by following the documentation for the Capacitive 3D Comb Drive:
file:///C:/COMSOL35/doc/mems/wwhelp/wwhimpl/common/html/wwhelp.htm#href=memsactuatormodels.18.4.html&single=true
When I try to add another version of the above system by using Copy+Paste, the array tool, or the mirror tool, Comsol will not mesh this structure either (Error 4100). I tried using the "Interactive Meshing" feature and meshed each boundary, but then I get Error 7067: System Matrix is 0.
I would appreciate any help and suggestions anyone has... I've been stuck on this problem a while.
4 Replies Last Post 2012年6月18日 GMT-4 13:53